LCP等离子机

2025-07-11 18:38:20

型号Model number		AnPT-SCP 300
生产能力Productive capacity	板厚Panel thickness	0.3-4mm
	电极尺寸Electrode size	330*330mm
	蚀刻效率Etching efficiency	＞2500A/min
	抽真空Vacuum extraction	30s
水滴角Water drop Angle		＜30°
蚀刻均匀性Etching uniformity		≥90%（8寸晶圆121点测试8-inch wafer 121-point test）
重复性很好The repeatability uniformity is very good		＜5%
达因值Dyne value		>50dyne/cm
气体用量Gas consumption		15- 300ml/min
真空能力Vacuum capacity		极限真空<30mT, 漏率<30mT/min; 工艺真空度80-500mT Limit vacuum <30mT, leakage rate <30mT/min; Process vacuum 80-500mT
射频电源Radio frequency power supply		1000w/13.56MHz
气体纯度Gas purity		99.999%

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